Semiconductor Exhaust Gas Treatment For Changzhou G Semiconductor Co., Ltd.

Background & Challenge
Changzhou G Semiconductor produces mixed acidic and alkaline exhaust gases from semiconductor manufacturing, including NOx, acid mist, and alkaline vapors. The existing exhaust system struggled with:

1. Inconsistent removal performance

2. Risk of exceeding emission limits

3. Operational instability under fluctuating gas loads

The client needed a solution capable of reliably handling complex mixed gas streams while maintaining stable operation.

Solution Provided
Chaori delivered a custom-designed Packed Bed Wet Scrubber system, specifically tailored to the client’s gas composition and process conditions:
1. Optimized internal distribution to reduce short-circuiting and enhance contact between gas and scrubbing liquid
2. High-efficiency spray system ensuring uniform coverage across the packing bed
3. Carefully selected packing media suitable for both acidic and alkaline gases
4. Engineered for stable continuous operation under varying production loads
This approach maximized contact between exhaust gas and scrubbing medium, promoting thorough pollutant absorption across the full range of operating conditions.

Results & Benefits
The system successfully addressed the client’s challenges:

1. Stable removal performance for mixed acidic and alkaline exhaust gases

2. Consistent compliance with environmental regulations

3. Reliable continuous operation with reduced performance fluctuation

4. Improved overall gas treatment efficiency and lower risk of operational downtime

Conclusion:
The tailored wet scrubber system transformed a previously unstable and complex exhaust process into a reliable, compliant, and efficient solution, ensuring both environmental protection and operational stability.