Semiconductor Exhaust Treatment for Electronics Manufacturing For Lite-On Technology (Changzhou) Co., Ltd.
Challenge
Lite-On Technology, a global leader in optoelectronic components, required a comprehensive exhaust treatment solution for their Changzhou semiconductor facility. Key requirements included:
• Handling mixed exhaust streams containing acid mist and VOCs from semiconductor processes
• Ensuring stable operation with minimal interference to 24/7 production schedules
• Meeting strict national emission standards for both acid gases and organic compounds
• Providing long-term reliability with accessible maintenance design
Our Solution
Chaori Environmental designed an integrated exhaust treatment system combining wet scrubbing and activated carbon fiber purification technologies.
Key features include:
• Customized FRP wet scrubber for efficient acid mist removal with corrosion-resistant construction
• Activated carbon fiber organic exhaust purifier for high-efficiency VOCs adsorption and recovery
• Compact modular design suitable for space-constrained semiconductor cleanroom environments
• Automated control system with real-time monitoring for consistent compliance
Results
The system was engineered to deliver:
• Stable removal performance for both acid mist and organic exhaust components
• Low-maintenance operation supporting continuous semiconductor production
• Reliable long-term performance in high-purity manufacturing environment
• Full compliance with GB16297-1996 and relevant semiconductor industry standards
Facing Similar Exhaust Challenges?
Chaori Environmental provides customized wet scrubbing and organic exhaust solutions for semiconductor, photovoltaic, and electronics industries.